JPH022831U - - Google Patents
Info
- Publication number
- JPH022831U JPH022831U JP7902288U JP7902288U JPH022831U JP H022831 U JPH022831 U JP H022831U JP 7902288 U JP7902288 U JP 7902288U JP 7902288 U JP7902288 U JP 7902288U JP H022831 U JPH022831 U JP H022831U
- Authority
- JP
- Japan
- Prior art keywords
- processing apparatus
- wafer processing
- heater
- inert gas
- inner tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000011261 inert gas Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7902288U JPH022831U (en]) | 1988-06-15 | 1988-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7902288U JPH022831U (en]) | 1988-06-15 | 1988-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH022831U true JPH022831U (en]) | 1990-01-10 |
Family
ID=31303911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7902288U Pending JPH022831U (en]) | 1988-06-15 | 1988-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH022831U (en]) |
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1988
- 1988-06-15 JP JP7902288U patent/JPH022831U/ja active Pending